概述

FPD Steppers Resolution: 2.4 µm (isolated pattern), 3 µm (L/S) Projection magnification: 1:1.25 Exposure field: 132 mm square to 105.87 (H) × 153.75 (V) mm (≦ ø186.68 mm) Reticle size: 6-in. (0.25-in. thickness) Maximum plate size: 600 (X) × 720 (Y) mm Overlay: 0.5 µm (|M| + 3σ, EGA) Options: Pellicle particle detector, extended reticle library, six-reticle multichanger, bar-code reader, plate edge exposure function, etc.