nB5
概述
Round-beam vector-scan system using a step-and- repeat method for nanopatterning, and has been specially designed for mix-and-match lithography. Specification: Beam Voltage range 20kV - 100kV Feature size on resist <8nm Stitching/overlay error <25nm for 500um field Automatic loading 5 chuck airlock system
活躍中的上架商品
0
服務
檢驗、保險、評估、物流
最熱門的上架商品
- 未找到產品