概述

Transpector XPR3 is the next generation in highpressure, quadrupole-based process gas analysis. It builds on the success of previous INFICON systems to allow monitoring of physical vapor deposition (PVD) processes with unprecedented sensitivity, accuracy and flexibility. A series of technological breakthroughs allow the compact Transpector XPR3 to operate from 20 mTorr to ultrahigh vacuum without the need for large, complex pressure conversion equipment.