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6" Fab For Sale from Moov - Click Here to Learn More
6" Fab For Sale from Moov - Click Here to Learn More
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6" Fab For Sale from Moov - Click Here to Learn More
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CX-2LS

類別
Laser
概述

Cymer's first prototype KrF laser for lithography. The first generation excimer laser (CX‐2LS) for lithography operated at 200 Hz and 3 W, with a spectral bandwidth of 3 pm and a wavelength stability of ±0.5 pm.

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