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描述
1 chamber配置
1 chamber SMIF : NONE CASSETTE CHAMBER GATE : MANUAL TYPE PROGRESS TYPE: CHAMBER POSITION: INDEXER : 003-9010-03, BROOKS AUTOMATION ALIGNER : 001-2980-64, BROOKS AUTOMATION ROBOT : 001-7500-02, BROOKS AUTOMATION TURBO PUMP (L/L1) : TMP260U, LEYBOLD TURBO PUMP (L/L2) : TMP260SG, LEYBOLD TURBO PUMP (TM) : TMP361C, LEYBOLD PROCESS MODULE-STATION 2 -PROCESS : ION BEAM ETCH -TURBO PUMP : TPH2200U,PFEIFFER BALZERS -RF GENERATOR : RFPP, RF20M -BEAM-HIGH VOLTAGE POWER SUPPLY : SL1200, SPELLMAN -SUPPRESOR-HIGH VOLTAGE POWER SUPPLY : SL300, SPELLMAN -PBN POWER SUPPLY-BODY : DCS60-18E, SORENSON -PBN POWER SUPPLY-DISCHARGE : DCS600-1.75E, SORENSON -PRESSURE GUAGE : CT27A12TBC810 MKS, BAG100-SD, CONVECTRON TYPE-685 -ISOLATION VALVE : 14048-PE44-AAL1/0014, VAT -GAS BOX GAS-1 : Ar, 50SCCM GAS-2 : O2, 50SCCM GAS-3 : MFC NONE GAS-4 : MFC NONE DRY PUMP : none CHILLER : HX-150, NESLAB PCW FLOW PANEL : NOT OEM, PCW DISRIBUTION & FLOW MONITORINGOEM 代工型號說明
未提供文檔
類別
Ion Milling
上次驗證: 25 天前
關鍵商品詳情
條件:
Used
作業狀態:
Deinstalled
產品編號:
105285
晶圓尺寸:
8"/200mm
年份:
1999
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
VEECO/MICROETCH
RF-350 S
類別
Ion Milling
上次驗證: 25 天前
關鍵商品詳情
條件:
Used
作業狀態:
Deinstalled
產品編號:
105285
晶圓尺寸:
8"/200mm
年份:
1999
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available