The AMAT VIISTA 810XE (formerly Varian VIISTA 810XE) is part of a single wafer ion implanter series. The VIISta 810XE is a highly productive medium current ion implanter that operates within the energy range of 2keV to 810keV, with an optional range of 2keV to 900keV. It is considered the industry standard for its maximum throughput of over 400 wafers per hour, precise doping with a patented dose control system, and unmatched contamination control with a unique dual magnet beamline.

November 10, 2011 – Applied Materials, Inc. announced the successful completion of its acquisition of Varian Semiconductor Equipment Associates, Inc. 
Varian is the leading supplier of ion implantation equipment used by chip makers and has been applying this technology to crystalline silicon wafers for photovoltaic panels. Varian will operate as a business unit of Applied's Silicon Systems Group.

VIISta 810XE

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