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E500-EHPi

概述

The EHPi-500 with a wider energy range up to 780 keV, 10% higher maximum throughputs, and new statistical process monitoring capabilities. This industry-proven system offers the highest industry throughput and the widest energy range....all in the most reliable medium current system available for features sizes down to 0.18 micron and wafer sizes up to 200mm.

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