Medium Current Ion Implanter 
Cassette to Cassette : YES
Other Information : Tool was up to now in production and can be inspected in cleanroom.
 
Flow Hood missing, no Roughpumps included (Edwards Setup)
Lower Machine Front Panels missing (below the Table)
Power Requirements : 208 V
    97.0 A
    50 Hz
    3 Phase

CE Marked : YES
Energy Range:	180KeV

In 2000, Eaton spun off Axcelis as a separate company, and Axcelis inherited Eaton’s 50-percent ownership stake in the joint venture. SEN, licenses technology from Axcelis for ion implantation, has exclusive rights to the territory of Japan and is the leading producer of ion implantation equipment in Japan. In 2009, the merger between Axcelis Technologies and Sumitomo Heavy Industries dissolved—Sumitomo became the sole parent company, and with this, the company name changed to SEN Corporation.

SEN CORPORATION / SUMITOMO

EATON NOVA / AXCELIS NV GSD 200 E is a Implanters system. The NV GSD 200 E can produce wafer size of 8”.

NV GSD 200E

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SEN CORPORATION / SUMITOMO

NV GSD 200E

High Current

類似上架商品

SEN CORPORATION / SUMITOMO

NV GSD 200E

NV GSD 200E

High Current

類似上架商品

SEN CORPORATION / SUMITOMO

NV GSD 200E