描述
無描述配置
• Inline left or right configuration available • Altitude: Varies by site • Lens Type: 4:1, 9M 4IL1 • Chamber Set Point Temperature: 22.2°C • Variable numerical aperture: 0.40-0.52 • Sigma Illuminator: 0.75 • 3.5kW Mercury ARC Lamp • Laser Step Alignment (LSA) • Phase Contrast Field Image Alignment (PCFIA) • AIS Focus Calibration • Active Vibration Isolation System • Reticle Size: 6 x 0.25 inches • Reticle Barcode Reader • Moveable Reticle Microscope • Pellicle Particle Detector (PPD3) • Wafer Loader with Type 3 Wafer Loader Controller • Ceramic Wafer Holder • Chip leveling (Multi-Point Focus/Level) • Extended wafer carrier table • Tool was used in a copper process line for polymide exposeOEM 代工型號說明
The NIKON NSR SF100 is a Steppers and Scanners system. The NSR SF100 can be used with Wafer Size of 8”. The NSR SF100 design predicts the line configuration for 2001 and beyond, and responds with a high throughput of 80 plus wafers/hour on full-scale production lines using 300 mm wafers.文檔
無文檔
NIKON
NSR-SF100
已驗證
類別
I-Line
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
23977
晶圓尺寸:
12"/300mm
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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NIKON
NSR-SF100
已驗證
類別
I-Line
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
23977
晶圓尺寸:
12"/300mm
年份:
未知
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
• Inline left or right configuration available • Altitude: Varies by site • Lens Type: 4:1, 9M 4IL1 • Chamber Set Point Temperature: 22.2°C • Variable numerical aperture: 0.40-0.52 • Sigma Illuminator: 0.75 • 3.5kW Mercury ARC Lamp • Laser Step Alignment (LSA) • Phase Contrast Field Image Alignment (PCFIA) • AIS Focus Calibration • Active Vibration Isolation System • Reticle Size: 6 x 0.25 inches • Reticle Barcode Reader • Moveable Reticle Microscope • Pellicle Particle Detector (PPD3) • Wafer Loader with Type 3 Wafer Loader Controller • Ceramic Wafer Holder • Chip leveling (Multi-Point Focus/Level) • Extended wafer carrier table • Tool was used in a copper process line for polymide exposeOEM 代工型號說明
The NIKON NSR SF100 is a Steppers and Scanners system. The NSR SF100 can be used with Wafer Size of 8”. The NSR SF100 design predicts the line configuration for 2001 and beyond, and responds with a high throughput of 80 plus wafers/hour on full-scale production lines using 300 mm wafers.文檔
無文檔
類似上架商品
查看全部無類似上架商品