概述

The FPA-3030i5a is an i-Line Stepper from Canon that supports reduced Cost-of-Ownership manufacturing for small substrates. It supports a wide range of wafer sizes from 50mm (2inch) to 200mm (8inch) and is capable of imaging resolution below 0.35 microns while maintaining 40 nm overlay accuracy and high productivity. Canon developed the FPA-3030i5a to provide stable imaging, overlay and productivity for RF, Photonics, Sensor, Power, 5G Communication and MEMS applications.