概述

Sure! Here’s the updated statement: “The Varian xR200S, part of the xRS Series implanters, offers higher throughput and lower cost of ownership due to enhancements such as a low inertia process wheel and faster spin motor. This results in a processing speed of 235 wafers per hour for 200mm wafers and 220 wafers per hour for 300mm wafers. Additionally, the xR200S provides maximum flexibility by offering the largest energy range available, up to 720keV with the high-energy option.