概述

The Single Column is our legacy model that pioneered the EcoGuard™ technology. The SC features a single column scrubber with a dual inlet/dual burner to handle the exhaust of two pumps/semiconductor process chambers. Existing abatement solutions aim to scrub then dispose of hazardous by-products created during LED, LCD, Semiconductor, and Solar production processes. With increasing regulations and costs associated with utilities such as power and water, the common “wet scrubbers” and “chemical adsorption” methods utilized by such technologies have become inefficient.