概述

System configuration: Cluster type Substrate: φ100mm, φ150mm Main pump: Turbo Moleculer Pump (TMP) Electric power: 3φ AC200V±10% 125A 50/60Hz Cooling water: 30〜34L/min 0.2〜0.3MPa 15〜30℃ Compressed air: 0.5〜0.8MPa Process Gas: 0.15〜0.4MPa Throughput: 3.5min/set (It varies according to a process condition) Weight: 3720kg (Main body) Footprint: W3300mm×D5100mm (standard specification)