TWINSCAN NXE:3400C
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EUV概述
The TWINSCAN NXE:3400C lithography system supports EUV volume production at the 7 and 5 nm nodes. The TWINSCAN NXE:3400C is the successor of the NXE:3400B and will support EUV volume production at the 7 and 5 nm nodes at a higher productivity.
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