描述
This Tool will not come with HDD配置
Oxide Etcher ➢ 4 SCCM Etch Chambers ➢ FOUP Opener: SELOP12F25-30U-14 ➢ Process Gases Used: N2, C4F8, Ar, O2, CH2F2, CHF3, CF4, C4F8, C3F8, C4F6, He/O2OEM 代工型號說明
Telius-SP is a high-performance etching system designed for large diameter (300 mm) requirements. It is part of the Telius platform and offers improved productivity through increased throughput, a reduced footprint, and higher energy efficiency. The system can be fitted with various chamber applications, including DRM and SCCM chambers, to support a wide range of process areas. It can support up to 4 chambers and boasts a high throughput, compact design, and low cost of ownership (CoO). Additionally, the system is designed for ease of maintenance. Overall, Telius-SP is a versatile and cost-effective solution for large diameter etching needs.文檔
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TEL / TOKYO ELECTRON
TELIUS SP 305 SCCM
已驗證
類別
Plasma Etch
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
44210
晶圓尺寸:
12"/300mm
年份:
2008
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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TEL / TOKYO ELECTRON
TELIUS SP 305 SCCM
已驗證
類別
Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
44210
晶圓尺寸:
12"/300mm
年份:
2008
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
This Tool will not come with HDD配置
Oxide Etcher ➢ 4 SCCM Etch Chambers ➢ FOUP Opener: SELOP12F25-30U-14 ➢ Process Gases Used: N2, C4F8, Ar, O2, CH2F2, CHF3, CF4, C4F8, C3F8, C4F6, He/O2OEM 代工型號說明
Telius-SP is a high-performance etching system designed for large diameter (300 mm) requirements. It is part of the Telius platform and offers improved productivity through increased throughput, a reduced footprint, and higher energy efficiency. The system can be fitted with various chamber applications, including DRM and SCCM chambers, to support a wide range of process areas. It can support up to 4 chambers and boasts a high throughput, compact design, and low cost of ownership (CoO). Additionally, the system is designed for ease of maintenance. Overall, Telius-SP is a versatile and cost-effective solution for large diameter etching needs.文檔
無文檔