描述
Dielectric Etch (Contact)配置
-Software Version: 5.65 -CIM: Yes -Main System: Main mini environment Platform (1) ok[√ ] -SMIF System: Shinko (4) ok[√ ] -Handler System: Shinko (1) ok[√ ] Orient (1) ok[√ ] -Process chamber 1: Pendulum Valve (1) ok[√ ] Turbo pump (1) ok[√ ] Shutter assembly (1) ok[√ ] RF generator/Matcher (1) ok[√ ] Process kits Set (Need to change new kits) ESC assembly (1) (Need to change new kits) Gauge Set ok[√ ] -Process chamber 2 Pendulum Valve (1) ok[√ ] Turbo pump (1) ok[√ ] Shutter assembly (1) ok[√ ] RF generator/Matcher (1) ok[√ ] Process kits Set (Need to change new kits) ESC assembly (1) (Need to change new kits) Gauge Set ok[√ ] -Load lock module LLM CM VAC Valve (1) ok[√ ] ARM DRIVE (1) ok[√ ] ARM Fork (1) ok[√ ] Gauge (1) ok[√ ] -End point detection SE2000 (1) ok[√ ] -Gas panel for PM1/PM2 H2 (1) (MFC Lack) CH2F2 (1) ok[√ ] CH3F (1) (MFC Lack) CF4 (1) ok[√ ] O2 (1) ok[√ ] O2 (1) ok[√ ] C4F6 (1) ok[√ ] C4F8(1) ok[√ ] CHF3 (1) ok[√ ] CO (1) ok[√ ] Ar (1) ok[√ ] N2 (1) (MFC Lack) -Power rack: set ok[√ ]OEM 代工型號說明
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TEL / TOKYO ELECTRON
TELIUS SP 305 SCCM TE
已驗證
類別
Plasma Etch
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
52302
晶圓尺寸:
12"/300mm
年份:
2007
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
TEL / TOKYO ELECTRON
TELIUS SP 305 SCCM TE
已驗證
類別
Plasma Etch
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
52302
晶圓尺寸:
12"/300mm
年份:
2007
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Dielectric Etch (Contact)配置
-Software Version: 5.65 -CIM: Yes -Main System: Main mini environment Platform (1) ok[√ ] -SMIF System: Shinko (4) ok[√ ] -Handler System: Shinko (1) ok[√ ] Orient (1) ok[√ ] -Process chamber 1: Pendulum Valve (1) ok[√ ] Turbo pump (1) ok[√ ] Shutter assembly (1) ok[√ ] RF generator/Matcher (1) ok[√ ] Process kits Set (Need to change new kits) ESC assembly (1) (Need to change new kits) Gauge Set ok[√ ] -Process chamber 2 Pendulum Valve (1) ok[√ ] Turbo pump (1) ok[√ ] Shutter assembly (1) ok[√ ] RF generator/Matcher (1) ok[√ ] Process kits Set (Need to change new kits) ESC assembly (1) (Need to change new kits) Gauge Set ok[√ ] -Load lock module LLM CM VAC Valve (1) ok[√ ] ARM DRIVE (1) ok[√ ] ARM Fork (1) ok[√ ] Gauge (1) ok[√ ] -End point detection SE2000 (1) ok[√ ] -Gas panel for PM1/PM2 H2 (1) (MFC Lack) CH2F2 (1) ok[√ ] CH3F (1) (MFC Lack) CF4 (1) ok[√ ] O2 (1) ok[√ ] O2 (1) ok[√ ] C4F6 (1) ok[√ ] C4F8(1) ok[√ ] CHF3 (1) ok[√ ] CO (1) ok[√ ] Ar (1) ok[√ ] N2 (1) (MFC Lack) -Power rack: set ok[√ ]OEM 代工型號說明
未提供文檔
無文檔