SPTS's uEtch is a single-wafer system specifically designed for university and small research laboratories.
  Can process single whole wafers (100-200mm) or die on a carrier
  HF vapor processes are transferable to SPTS 3- and 25-wafer production systems, offering a path from concept to production

Previously under Orbotech that KLA acquired in 2019.

SPTS Technologies provides advanced wafer processing solutions to the world's leading semiconductor and microelectronic device manufacturers. We make electronics possible.

PRIMAXX uETCH

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