跳到主要內容
6" Fab For Sale from Moov - Click Here to Learn More
6" Fab For Sale from Moov - Click Here to Learn More
Moov logo

6" Fab For Sale from Moov - Click Here to Learn More
Moov Icon

TCP 9100

概述

The Transformer-Coupled Plasma (TCP) 9100 system is a high-density oxide-etch system announced by Lam Research Corp. It is designed to meet the full spectrum of requirements in oxide-etch processing and manufacturing for advanced microprocessor and memory devices. The TCP 9100 is the industry’s first tool that combines high throughput with high etch rates and advanced process performance, while etching devices in the deep submicron regime, with minimum feature sizes of less than 0.35 micron. It responds to chipmakers’ need for an oxide-etch method that can meet their dual requirements for 0.25-micron processing capability and consistent production performance. The TCP 9100 system is a multichamber cluster tool on Lam’s Advanced Capability Alliance platform, capable of supporting up to four process chambers.

活躍中的上架商品

0

服務

檢驗、保險、評估、物流

最熱門的上架商品

    未找到產品
有類似商品?
利用 Moov 將其上架並立即找到完美的買家。