APS-3800
概述
Alcan (Canon): APS-3800 three-chamber cluster tool. Helicon wave source licensed from Plasma and Materials Technology (MORI source), metal etch, poly etch, resist strip.
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Alcan (Canon): APS-3800 three-chamber cluster tool. Helicon wave source licensed from Plasma and Materials Technology (MORI source), metal etch, poly etch, resist strip.
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檢驗、保險、評估、物流