APEX
概述
Alcan (Canon): APEX single-chamber etch system. Helicon wave source licensed from Plasma and Materials Technology (MORI source), metal etch, poly etch.
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Alcan (Canon): APEX single-chamber etch system. Helicon wave source licensed from Plasma and Materials Technology (MORI source), metal etch, poly etch.
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檢驗、保險、評估、物流