描述
300MM ASME 3000 EPI HEX配置
Software Version: Standard CIM: SECS GEM Process: EPI Main System: Main Tool OK Handler System: Standard 1 OK Factory Interface: FOUP 4 OK Others: Upgrades 2006-2011Mass Flow Verifcation Upgrades on CMD1 ASM EPI PRE ALIGNER U/G CMD1 ASM CONTROL UPGRADE ON EPI TOOL ASM EPI Backpressue U/G 4 OKOEM 代工型號說明
未提供文檔
無文檔
類別
Epitaxial deposition (EPI)
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
106597
晶圓尺寸:
12"/300mm
年份:
2003
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ASM
EPSILON E3000
類別
Epitaxial deposition (EPI)
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
106597
晶圓尺寸:
12"/300mm
年份:
2003
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
300MM ASME 3000 EPI HEX配置
Software Version: Standard CIM: SECS GEM Process: EPI Main System: Main Tool OK Handler System: Standard 1 OK Factory Interface: FOUP 4 OK Others: Upgrades 2006-2011Mass Flow Verifcation Upgrades on CMD1 ASM EPI PRE ALIGNER U/G CMD1 ASM CONTROL UPGRADE ON EPI TOOL ASM EPI Backpressue U/G 4 OKOEM 代工型號說明
未提供文檔
無文檔