概述

The AMAT 7600 epi reactor, introduced in 1975, was a much improved version of the earlier 7000 series system. It became the flagship of Applied Materials epi lines. The 7600 was a radiant hot wall system, meaning that it used lamps outside of the bell jar to supply the reaction energy. This gave it the economic advantage of containing many more wafers than could be held by competitive systems. The process provided several technical advantages as well. The 7600 became the standard bearer of the industry until single wafer, platform systems evolved.