待售二手貨 APPLIED MATERIALS (AMAT) CENTURA 4.0

描述

2 Radiance Chambers

配置

System Overview Wafer Size 300mm Wafer Sharp SNNF Chamber Type / Location Mainframe RP Centura 4.0 MAINFRAME Position A RTP RADIANCE 300MM RP Position B RTP RADIANCE 300MM RP Position C RTP RADIANCE 300MM RP Position D Empty Position E Empty Electrical Requirements Line Voltage 200/208 VAC Mainframe AC Box 250A Customer UPS Interface None SEMI F47 Voltage Sag Detection NA System Safety Equipment System Labels English with Chinese non-simplified RTP Radiance / Radiance Plus RP Chamber Technology Option Open Loop Tuner Process Application RTO Configuration RGA Port and Valve RGA Port and Valve Included Process Chamber Kit Thin and Thick Oxide Reflector Plate RADIANCE Reflector Plate with Backside Purge Rotation MAGLEV Lamp Head Pressure Control None O-ring Type CHEMRAZ Chamber Safety Options RTP Radiance Chamber A Skins Yes RTP Radiance Chamber B Skins Yes RTP Radiance Chamber C Skins Yes RTP Radiance / Radiance Plus RP Gas Panel Options Gas Delivery Configuration Gas Pallet VCR Type MFC Type TBD Gas Line 1 N2 - 100 SCCM Gas Line 2 None Gas Line 3 None Gas Line 4 None Gas Line 5 NH3 - 30 SCCM Gas Line 6 None Gas Line 7 O2 - 30 SLM Gas Line 8 None Gas Line 9 None Gas Line 10 None Gas Line 11 N2 - 30 SLM Gas Line 12 N2 UNREGULATED Gas Line 13 N2 - 50 SLM Gas Line 14 HE - 30 SLM Pumps L/L Pump Alcatel XFER Pump Alcatel Chamber Pump TBD System Monitors Monitor 1 17 Inch Flat Panel with Keyboard on ERGO Arm Monitor 2 Remote 17 Inch Flat Panel on Stand Monitor 1 Cable None Monitor 2 Cable 50 ft with 41 ft Effective AC Boxes RTP or RPO AC Box RTP AC Box