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APPLIED MATERIALS (AMAT) / SEMITOOL RAIDER ECD
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    條件:Used

    作業狀態:

    產品編號:13867

    晶圓尺寸:12"/300mm

    年份:2009

    描述

    Electroplating

    配置

    無配置

    文檔
    無文檔
    OEM 代工型號說明

    The Raider™ ECD is a fourth-generation single wafer electrochemical deposition tool that delivers advanced metal processing in a small footprint. It is an automated, multi-process tool that is available with cluster modules for metrology, plating, and cleaning. The Raider™ incorporates programmable reactors and can provide an ECD seed layer, a full solution for copper fill with uniformity and film characteristics, and integrated removal of all backside, bevel, and edge copper contamination and seed layer edge exclusion etch. Additionally, in-situ anneal is available. This tool is designed to provide advanced metal processing capabilities in a compact and efficient package.

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