描述
無描述配置
Software Version V5.80c CIM E84, SECS/GEM, GEM300, Interface A Process ETC_GatePatterning Main System TACTRUS NCCP 1 OK Handler System Vacuum Transfer Module 1 OK Handler System Loader Module 1 OK Handler System Loadlock Module 1 OK Factory Interface FOUP 5 OK RF Generators 4 OK AC Power Rack 1 OK Pump Rack 1 OK Pumps 4 OK Chillers 4 OKOEM 代工型號說明
未提供文檔
無文檔
TEL / TOKYO ELECTRON
TACTRUS NCCP
已驗證
類別
Dry / Plasma Etch
上次驗證: 23 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
106074
晶圓尺寸:
12"/300mm
年份:
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
TEL / TOKYO ELECTRON
TACTRUS NCCP
類別
Dry / Plasma Etch
上次驗證: 23 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
106074
晶圓尺寸:
12"/300mm
年份:
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
Software Version V5.80c CIM E84, SECS/GEM, GEM300, Interface A Process ETC_GatePatterning Main System TACTRUS NCCP 1 OK Handler System Vacuum Transfer Module 1 OK Handler System Loader Module 1 OK Handler System Loadlock Module 1 OK Factory Interface FOUP 5 OK RF Generators 4 OK AC Power Rack 1 OK Pump Rack 1 OK Pumps 4 OK Chillers 4 OKOEM 代工型號說明
未提供文檔
無文檔