概述

The Kiyo C series is part of Lam’s Kiyo product family, which delivers high-performance capabilities for conductor etching in semiconductor devices. Conductor etching is a crucial process that shapes the electrically active materials in a semiconductor device, and even slight variations can impact device performance. The Kiyo C series offers superior uniformity and repeatability, enabled by a symmetrical chamber design, industry-leading electrostatic chuck technology, and independent process tuning features. It also provides high productivity with low defectivity on multi-film stacks, thanks to its in-situ etch capability, continuous plasma, and advanced waferless auto-clean technology. Additionally, the Kiyo C series is upgradable, providing a low cost of ownership over several device generations.