CENTURA RPS
概述
The Remote Plasma Source (RPS) Centura, introduced in June 1995, extended the AMAT range of dielectric dry etch process technologies to several isotropic etch steps.
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The Remote Plasma Source (RPS) Centura, introduced in June 1995, extended the AMAT range of dielectric dry etch process technologies to several isotropic etch steps.
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檢驗、保險、評估、物流