描述
無描述配置
Main System: ASM A412 SMIF System: E84, SECS/GEM, GEM300 Software Version: 6.85B Tool's Recipe Capability: Batch Does the tool have a SECS/GEM interface? Yes How many ports does this tool have? 2 Protocol Zones Allowed: FEOL Chamber ID's or Station ID's Chamber or Station Description RC1BOATA Node Nitride; Reactor1 Boat A RC1BOATB Node Nitride; Reactor1 Boat B RC2BOATA Node Nitride; Reactor2 Boat A RC2BOATB Node Nitride; Reactor2 Boat B RC1 Reactor 1 RC2 Reactor 2OEM 代工型號說明
The ASM A412 is a vertical furnace system with a proven track record of more than 1,000 reactors shipped to customers worldwide and over 22 years of maturity in semiconductor manufacturing.文檔
無文檔
ASM
A412
已驗證
類別
Furnaces / Diffusion
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
50603
晶圓尺寸:
12"/300mm
年份:
2011
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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ASM
A412
已驗證
類別
Furnaces / Diffusion
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
50603
晶圓尺寸:
12"/300mm
年份:
2011
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
Main System: ASM A412 SMIF System: E84, SECS/GEM, GEM300 Software Version: 6.85B Tool's Recipe Capability: Batch Does the tool have a SECS/GEM interface? Yes How many ports does this tool have? 2 Protocol Zones Allowed: FEOL Chamber ID's or Station ID's Chamber or Station Description RC1BOATA Node Nitride; Reactor1 Boat A RC1BOATB Node Nitride; Reactor1 Boat B RC2BOATA Node Nitride; Reactor2 Boat A RC2BOATB Node Nitride; Reactor2 Boat B RC1 Reactor 1 RC2 Reactor 2OEM 代工型號說明
The ASM A412 is a vertical furnace system with a proven track record of more than 1,000 reactors shipped to customers worldwide and over 22 years of maturity in semiconductor manufacturing.文檔
無文檔