概述

STI’s iFocus is a highly intelligent precision wafer inspection system that offers a comprehensive solution for the inspection of frame and/or whole wafer. Using STI’s proprietary On-The-Fly (OTF™) vision, the iFocus can be configured to detect any type of micro defects arising from wafer processing, post dicing or packing. The OTF™ optical system encompasses pioneering technology in areas such as optics and illumination design, 2D, 3D and active die inspection algorithms. Patented Simultaneous Dual Illumination Image Capture Technology is used to eliminate escape and reduce overkill without compromising throughput.