概述

The NovusEdge System provides high sensitivity inspection for the edge and backside of bare unpatterned wafers for current and advanced nodes. Multiple modules can be configured on the same automation platform for increased throughput while maintaining a small footprint for an improved cost of ownership. The edge-gripping handling solution for both automation platform and the inspection modules provides desired cleanliness required for wafer manufacturing. Optional high-sensitivity notch inspection can be added to the configuration. Defects detected are automatically classified and binned at run time to reduce manual operator review. The system is designed as a multipurpose inspection and sorting system for end of line outgoing quality inspection of 300mm unpatterned wafers. The system allows for identifying, inspecting, and sorting the wafers according to freely definable recipes.