概述

The AXi™ 940 is a frontside inspection module that is designed to reduce cost of ownership by improving defect detectability across multiple front-end applications. It delivers higher resolution than traditional macro systems while maintaining high throughput required in today’s advanced high-volume processes. The AXi 940 addresses customer demand for both productivity and capability by eliminating the small lot penalty and providing numerous automated capabilities, including advanced proprietary defect detection algorithms, real-time binning to on defects of interest, multiple resolution capability, five-minute recipe creation, and three simultaneous defect review methods: on-the-fly, high resolution, whole wafer. The AXi 940 can also team with edge and backside modules for an all-surface solution. Overall, the AXi 940 is a powerful tool for automated, 100% advanced macro defect inspection.