The INS3000 DUV is an automated optical defect review and classification system that combines the benefits of a conventional microscope with automation. It has a high resolution of up to 80nm, spanning visible, UV, and DUV wavelengths.

KLA-Tencor Corporation announced that it has completed its acquisition of the Microelectronic Inspection Equipment (MIE) business unit of Vistec Semiconductor Systems. 
Vistec Semiconductor Systems - MIE provides advanced semiconductor mask and wafer manufacturing systems. 

On February of 2006, Leica Microsystems' Semiconductor Equipment Division has a new name: Vistec Semiconductor Systems. The name change is a result Golden Gate Capital takeover of Leica's semiconductor business.

INS3000 DUV

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