 The Teron 630 incorporates advanced imaging modes, third generation database modeling and new detectors to enable defect inspection of optical and EUV reticles during both development phase and production at mask shops.

KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

Teron 630

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