概述

In 1992, KLA introduced the KLA 2130 which is capable of "all pattern" inspection required for microprocessors and other logic devices as well as both the logic and repeating array portions of memory devices. KLA-2130 wafer inspection system, resolution of 0.25 micron, die-to-die comparison, inspection rates range from 15 sec/cm^ at 0.5-micron resolution to 70 sec/cm^ at 0.25-inicron resolution for random mode.