概述

The Surfscan® SP7XP unpatterned wafer inspection system facilitates qualification and monitoring of processes and tools for IC, wafer, equipment and materials manufacturers for ≤5nm logic and advanced memory design nodes. With industry-best 12.5nm sensitivity and high throughput, the Surfscan SP7XP provides a single tool solution for both R&D pathfinding applications and process monitoring during high volume manufacturing. Built on the industry-standard Surfscan® platform, the Surfscan SP7XP delivers ultimate sensitivity to critical defects and enhanced defect classification for bare wafers, smooth and rough films, and fragile resists and litho stacks, including those used for EUV lithography. By discovering and identifying critical defects and surface quality issues, the Surfscan SP7XP enables faster identification of process and tool issues, driving faster ramp, higher yield and improved fab profitability.