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KLA SURFSCAN SP5
    描述
    BARE WAFER INSPECTION
    配置
    config detail attached KLA SP5 Main Components - Integrated Console Bare Wafer Inspection Station Equipment Front End Module (EFEM) 3 Port Wafer Loading Unit Description of Inspection System - Un-patterned wafer inspection platform to incorporate deep-ultraviolet (DUV) illumination. Deep Ultraviolet(DUV) source DUV-specific apertures to enable defect capture on un-patterned thin films High speed stage and advanced imaging computer for enhanced productivity Full-wafer high-resolution haze maps Defect Detection and Classification Capabilities Designed to capture a broad range of challenging defects for 2Xnm/1Xnm process nodes High-productivity rapid automated defect classification Coordinate accuracy to enable rapid defect re-detection and review Integrated, high resolution (~100 mega-pixel), full-wafer SURFmonitor™ haze maps, providing automatedcapture of ultra-fine slip lines and scratches or maps of surface roughness, grain size and other processparameters Surfscan SP5 system feature dramatic advances in sensitivity and throughput over their industry-benchmarkpredecessor, the Surfscan SP3. Inspection Module for the back side of wafers for defects that might deform the wafer shape.
    OEM 代工型號說明
    The Surfscan SP5 is a high-throughput, DUV-sensitive system for inspecting unpatterned wafer surfaces. It’s used in IC, substrate, and equipment manufacturing at the 2X/1Xnm design nodes.
    文檔

    KLA

    SURFSCAN SP5

    verified-listing-icon

    已驗證

    類別
    Defect Inspection

    上次驗證: 超過30天前

    關鍵商品詳情

    條件:

    Used


    作業狀態:

    未知


    產品編號:

    115330


    晶圓尺寸:

    未知


    年份:

    未知


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    類似上架商品
    查看全部
    KLA SURFSCAN SP5

    KLA

    SURFSCAN SP5

    Defect Inspection
    年份: 0條件: 二手
    上次驗證超過30天前

    KLA

    SURFSCAN SP5

    verified-listing-icon
    已驗證
    類別
    Defect Inspection
    上次驗證: 超過30天前
    listing-photo-7d098fee09254387b98c7bf8a6d518c0-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
    關鍵商品詳情

    條件:

    Used


    作業狀態:

    未知


    產品編號:

    115330


    晶圓尺寸:

    未知


    年份:

    未知


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    描述
    BARE WAFER INSPECTION
    配置
    config detail attached KLA SP5 Main Components - Integrated Console Bare Wafer Inspection Station Equipment Front End Module (EFEM) 3 Port Wafer Loading Unit Description of Inspection System - Un-patterned wafer inspection platform to incorporate deep-ultraviolet (DUV) illumination. Deep Ultraviolet(DUV) source DUV-specific apertures to enable defect capture on un-patterned thin films High speed stage and advanced imaging computer for enhanced productivity Full-wafer high-resolution haze maps Defect Detection and Classification Capabilities Designed to capture a broad range of challenging defects for 2Xnm/1Xnm process nodes High-productivity rapid automated defect classification Coordinate accuracy to enable rapid defect re-detection and review Integrated, high resolution (~100 mega-pixel), full-wafer SURFmonitor™ haze maps, providing automatedcapture of ultra-fine slip lines and scratches or maps of surface roughness, grain size and other processparameters Surfscan SP5 system feature dramatic advances in sensitivity and throughput over their industry-benchmarkpredecessor, the Surfscan SP3. Inspection Module for the back side of wafers for defects that might deform the wafer shape.
    OEM 代工型號說明
    The Surfscan SP5 is a high-throughput, DUV-sensitive system for inspecting unpatterned wafer surfaces. It’s used in IC, substrate, and equipment manufacturing at the 2X/1Xnm design nodes.
    文檔
    類似上架商品
    查看全部
    KLA SURFSCAN SP5

    KLA

    SURFSCAN SP5

    Defect Inspection年份: 0條件: 二手上次驗證:超過30天前