描述
無描述配置
• 300mm Dual Films Handler w/Integrated Mini Environment DP sensor • Two Front Interface Mechanical Standard (DFIMS) Load ports Integrated Sub Class 0.1 Mini Environment, Front to Back Configuration • Modular Inspection Station • Modular User Interface • High Res Auto Image grab w/DSA Option • Advanced Low Noise Detection Algorithms • Region Based Binning • Integrated High Magnification Review Optics & Camera with Auto focus - 5 selectable objectives w/Brightfield / Darkfield viewing • Defect Clustering & Review Sampling • Low Contact Chuck • Integrated ULPA Filter • Data Transfer including Floppy Disk, CD-R and Ethernet • Wafer Pre-Aligner • High Resolution Color Display • KLARF • Blanket Film Inspection • Automated Inspection Advanced Oblique Illumination Optics • Region Based Multi-Thresholding • IRIS spatial filtering technology • High resolution collection Optics w/improved polarization purity analyzers • New High Quantum Efficiency imaging sensor technology improving overall defect S/N in low light regions of the device • New Advanced flexible Image Computer enabling 2.0X increase in data processing rate • Higher Numerical Aperture (NA) Optics across the entire inspection operating range providing the highest sensitivity while enabling higher throughput modes for optimized CoO • Five-Line-Scan operating modes & new Optical Imaging Line for increased optical mode flexibility • Normal Illumination Optics which offers the highest sensitivity for unique (non-oblique) DOI capture • Advanced RFID Reader • GEM/SECS Interface • HSMS I/F (E5, E30, E37) • Advanced Automation Package (E84/E87/E40/E90/E94/E116) • CE ComplianceOEM 代工型號說明
The Puma 9550 is a darkfield wafer inspection platform that is part of the Puma 9500 Series. It introduces breakthrough optics and image acquisition technology that gives it twice the resolution at twice the speed of its predecessor. This allows the new Puma tools to monitor more layers and more defect types at darkfield speeds. The Puma 9550 Series wafer defect inspection system is backed by KLA-Tencor’s comprehensive service network to maintain its high performance and productivity.文檔
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KLA
PUMA 9550
已驗證
類別
Defect Inspection
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
13390
晶圓尺寸:
12"/300mm
年份:
2011
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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KLA
PUMA 9550
已驗證
類別
Defect Inspection
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
13390
晶圓尺寸:
12"/300mm
年份:
2011
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
• 300mm Dual Films Handler w/Integrated Mini Environment DP sensor • Two Front Interface Mechanical Standard (DFIMS) Load ports Integrated Sub Class 0.1 Mini Environment, Front to Back Configuration • Modular Inspection Station • Modular User Interface • High Res Auto Image grab w/DSA Option • Advanced Low Noise Detection Algorithms • Region Based Binning • Integrated High Magnification Review Optics & Camera with Auto focus - 5 selectable objectives w/Brightfield / Darkfield viewing • Defect Clustering & Review Sampling • Low Contact Chuck • Integrated ULPA Filter • Data Transfer including Floppy Disk, CD-R and Ethernet • Wafer Pre-Aligner • High Resolution Color Display • KLARF • Blanket Film Inspection • Automated Inspection Advanced Oblique Illumination Optics • Region Based Multi-Thresholding • IRIS spatial filtering technology • High resolution collection Optics w/improved polarization purity analyzers • New High Quantum Efficiency imaging sensor technology improving overall defect S/N in low light regions of the device • New Advanced flexible Image Computer enabling 2.0X increase in data processing rate • Higher Numerical Aperture (NA) Optics across the entire inspection operating range providing the highest sensitivity while enabling higher throughput modes for optimized CoO • Five-Line-Scan operating modes & new Optical Imaging Line for increased optical mode flexibility • Normal Illumination Optics which offers the highest sensitivity for unique (non-oblique) DOI capture • Advanced RFID Reader • GEM/SECS Interface • HSMS I/F (E5, E30, E37) • Advanced Automation Package (E84/E87/E40/E90/E94/E116) • CE ComplianceOEM 代工型號說明
The Puma 9550 is a darkfield wafer inspection platform that is part of the Puma 9500 Series. It introduces breakthrough optics and image acquisition technology that gives it twice the resolution at twice the speed of its predecessor. This allows the new Puma tools to monitor more layers and more defect types at darkfield speeds. The Puma 9550 Series wafer defect inspection system is backed by KLA-Tencor’s comprehensive service network to maintain its high performance and productivity.文檔
無文檔
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