The Surfscan SP2XP is an unpatterned wafer surface quality inspection system for inspecting bare wafers and blanket films with sensitivity. This advanced wafer quality inspection system also introduces an ultra-high sensitivity operating mode to accelerate development of 3Xnm and 2Xnm next-generation devices. The Surfscan SP2XP boasts proprietary UV technology to provide high sensitivity down to 30nm defect sizes. Its optical design enables enhanced sensitivity to defects on rough films.

KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

SURFSCAN SP2XP

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