The WI-3000 series inspects both two- and three-dimensional aspects and is designed for high speed inspection of all the bumps on a wafer. 

KLA-Tencor to acquire Belgium's ICOS Vision Systems
ICOS's primary business is the design and manufacture of inspection equipment for semiconductor packaging and interconnect applications. ICOS's systems also perform inspection of solar wafers and solar cells at different stages of production enabling solar manufacturers to effectively monitor the production process. The inspection modules allow fast, efficient and reliable optical classification of solar cells at the different stages of the production flow.

WI-3000

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