Thermo Fisher Scientific Inc. (NYSE: TMO), the world leader in serving science, today announced that it has completed its acquisition of FEI Company, Inc. (NASDAQ: FEIC), the leader in high-performance electron microscopy. FEI and Philips joined their technologies in 1993 to create the first DualBeam (FIB/SEM) workstation.

The Defect Analyzer 300 is an advanced 300 mm DualBeam system designed for in-fab structural diagnostics. It can accommodate either 300 mm or 200 mm wafers and delivers a powerful combination of tool automation, industry-leading electron imaging, unsurpassed focused ion beam milling, and proprietary beam chemistry technology. This enables three-dimensional analysis of advanced process defects, resulting in better control over advanced processes, reduced time-to-market, and drastically reduced process development costs. 

THERMOFISHER SCIENTIFIC / FEI / PHILLIPS

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