概述

The SEMVision cX is designed for the automatic review and classification of wafer defects in advanced semiconductor production lines. It builds on the company’s SEMVision system and features automatic material identification that characterizes defects on unpatterned wafers and provides chipmakers with information on the defect’s source. The system also offers high-productivity operation at 500 defects per hour and color MPSI (Multiple Perspective SEM Imaging) for enhanced topography and material information. The SEMVision cX is the first SEM review system to feature OperatorFree EDX (energy dispersive x-ray) analysis that increases processing speed of the system and requires less engineering expertise. For the first time, material information is combined with automated defect classification (ADC) to provide fab engineers with all vital defect data.