描述
無描述配置
Tool is currently still in production. Tool is in good condition. Inspect to confirm configuration and condition. <b>C2 Triple Speed Nanofill 2</b> Electrical Requirements : 208 VAC, 3 phase, 5-wire Wafer Size (inches) : 8 Wafer Type : Notch Stand Alone Install RF Generator Rack SSD Serial Numbers: DLCM : 25 Module A : 116 SCVD Module B : 13287113 SCV2 Module C : 90 SCV3 <b>DLCM </b> Signal Lamp Tower IOC Version : 4.2 Integrated SMIF Model : Asyst SMIF, LPI 2200 MAG 7 Robot TM Turbo Pump: PFEIFFER TMH260 SECS / GEMS <b>Speed Chambers </b> RF Match Type : AE Match Location : Pedestal Utility Box ESC Type : MC Gate Valve Mfg & Model : VAT Pedestal Lift Type : Multi-Pos Temp Monitoring : NTM 500C Turbo Pump: PFEIFFER TPH 2101 RF Generators Advanced Energy RFG5500 Advanced Energy PDX8000 <b>Pumps</b> Deposition Chamber Pump: Alcatel ADS 1202P Load Lock Pump: Alcatel A100L Transfer Chamber Pump: Alcatel A100L <b>Gas Box Configuration</b> Gas Line # Gas Flow (sccm) MFC Mfgr. MFC Model 1 SiH4 160 Horiba Z512 2 H2 2000 Unit UFC1661 3 Ar 500 Unit UFC1661 4 He 1000 Unit UFC1661 5 O2 500 Unit UFC1661 6 NF3 300 Unit UFC1661 7 He 300 Unit UFC1661 8 NF3 1000 Horiba Z512OEM 代工型號說明
SPEED Max offers significant processing flexibility and productivity advantages over the SPEED NExT system, and extends the HDP CVD application to the 45 and 32 nm technology nodes.文檔
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LAM RESEARCH / NOVELLUS
CONCEPT THREE "C3" SPEED MAX
已驗證
類別
CVD (Metalization)
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
16192
晶圓尺寸:
8"/200mm
年份:
2006
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH / NOVELLUS
CONCEPT THREE "C3" SPEED MAX
類別
CVD (Metalization)
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
16192
晶圓尺寸:
8"/200mm
年份:
2006
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
Tool is currently still in production. Tool is in good condition. Inspect to confirm configuration and condition. <b>C2 Triple Speed Nanofill 2</b> Electrical Requirements : 208 VAC, 3 phase, 5-wire Wafer Size (inches) : 8 Wafer Type : Notch Stand Alone Install RF Generator Rack SSD Serial Numbers: DLCM : 25 Module A : 116 SCVD Module B : 13287113 SCV2 Module C : 90 SCV3 <b>DLCM </b> Signal Lamp Tower IOC Version : 4.2 Integrated SMIF Model : Asyst SMIF, LPI 2200 MAG 7 Robot TM Turbo Pump: PFEIFFER TMH260 SECS / GEMS <b>Speed Chambers </b> RF Match Type : AE Match Location : Pedestal Utility Box ESC Type : MC Gate Valve Mfg & Model : VAT Pedestal Lift Type : Multi-Pos Temp Monitoring : NTM 500C Turbo Pump: PFEIFFER TPH 2101 RF Generators Advanced Energy RFG5500 Advanced Energy PDX8000 <b>Pumps</b> Deposition Chamber Pump: Alcatel ADS 1202P Load Lock Pump: Alcatel A100L Transfer Chamber Pump: Alcatel A100L <b>Gas Box Configuration</b> Gas Line # Gas Flow (sccm) MFC Mfgr. MFC Model 1 SiH4 160 Horiba Z512 2 H2 2000 Unit UFC1661 3 Ar 500 Unit UFC1661 4 He 1000 Unit UFC1661 5 O2 500 Unit UFC1661 6 NF3 300 Unit UFC1661 7 He 300 Unit UFC1661 8 NF3 1000 Horiba Z512OEM 代工型號說明
SPEED Max offers significant processing flexibility and productivity advantages over the SPEED NExT system, and extends the HDP CVD application to the 45 and 32 nm technology nodes.文檔
無文檔