描述

ACT8 4COT/4DEV Asset Description ACT8 4COT/4DEV Software Version 1.18.003 CIM SECS Process COAT / DEV Excluded Items List (Pumps, Chillers & Abatement are all excluded)

配置

4C4D Main System MAIN BODY 1 Handler System CRA 1 Handler System PRA 2 Handler System IRA 1 Factory Interface SMIF 3 Software Version: 1.18.003 CIM: SECS

OEM 代工型號說明

CLEAN TRACK™ ACT™ 8 is a state-of-the-art Coater/Developer designed for 75-200mm wafers. It offers stable, high-quality processing and enables a smooth transition from R&D to volume production. When used in-line with the exposure tool, the system has a similar footprint to its predecessors, but provides higher throughput due to its faster wafer transfer speed. The uptime has improved due to the increased reliability of components and ease of maintenance. The platform also uses a chemical filter and a high precision oven to support DUV processing. This makes it an ideal choice for those looking for a reliable and efficient Coater/Developer.