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TEL / TOKYO ELECTRON ACT 12
  • TEL / TOKYO ELECTRON ACT 12
  • TEL / TOKYO ELECTRON ACT 12
  • TEL / TOKYO ELECTRON ACT 12
描述
Multi Block (Resist Coater/Developer)
配置
無配置
OEM 代工型號說明
The CLEAN TRACK™ ACT™ 12 is a 300mm coater/developer that enables stable, high-quality processing and smooth transition from R&D to volume production. It is an in-line model with an exposure tool that has almost the same footprint as the previous track series, but provides higher throughput due to its high-speed transfer system. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. Additionally, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. This makes it a powerful tool for achieving consistent results in both research and production environments.
文檔

無文檔

類別
Coaters & Developers

上次驗證: 13 天前

關鍵商品詳情

條件:

Used


作業狀態:

未知


產品編號:

109167


晶圓尺寸:

12"/300mm


年份:

未知


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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TEL / TOKYO ELECTRON

ACT 12

verified-listing-icon
已驗證
類別
Coaters & Developers
上次驗證: 13 天前
listing-photo-a43a219382ea4ed79ce6882210d18364-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
關鍵商品詳情

條件:

Used


作業狀態:

未知


產品編號:

109167


晶圓尺寸:

12"/300mm


年份:

未知


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Multi Block (Resist Coater/Developer)
配置
無配置
OEM 代工型號說明
The CLEAN TRACK™ ACT™ 12 is a 300mm coater/developer that enables stable, high-quality processing and smooth transition from R&D to volume production. It is an in-line model with an exposure tool that has almost the same footprint as the previous track series, but provides higher throughput due to its high-speed transfer system. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. Additionally, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. This makes it a powerful tool for achieving consistent results in both research and production environments.
文檔

無文檔

類似上架商品
查看全部