Voltage: 400 VAC / 50 Hz / 16 A
Compressed air: 5 - 6 bar / tube OD 8 mm
Vacuum: min. - 0.7 bar / tube OD 8 mm
Nitrogen: 4.5 bar / tube OD 8 mm
Exhaust: OD 100 mm (3x)

SUSS MicroTec offers a wide product portfolio of high quality process solutions for the semiconductor industry and related markets. SUSS portfolio covers a comprehensive range of products and solutions for backend lithography, wafer bonding, and photomask processing, complemented by micro-optical components. 

SUSS MicroTec / KARL SUSS

DELTA 80 T2

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