描述

Description Dimension Qty Mirra Mainframe 81 X 65 X 87 1 Factory Interface 83 X 36 X 84 1 System Controller 36 X 42 X 83 1 Loader Track system 65 X 13 X 37 1 Monitor/computercart, Tall 23 X 25 X 71 1 Pallet 48 X 48 X 48 1

配置

OEM : LAM RESEARCH MODEL : MIRRA CMP WAFER SIZE: 8 INCH PROGRESS TYPE: FACTORY INTERFACE LOADER TRACK SYSTEM HEAD CONFIGURATION HEAD #1 TITAN 2 HEAD #2 TITAN 2 HEAD #3 TITAN 2 HEAD #4 TITAN 2 PLATEN #1 PLATEN #2 PLATEN #3