概述

The CV5000 is an advanced High Voltage CD-SEM (Critical Dimension-Scanning Electron Microscope) series launched on October 13, 2016. Designed to meet the evolving needs of semiconductor device manufacturing, the CV5000 excels in measuring High Aspect Ratio (HAR) trenches and contact holes. With the integration of a 30 kV electron gun and a specialized detection system, it can adeptly detect secondary and backscattered electrons, enabling precise measurements even at the bottom of deep trenches with aspect ratios exceeding 40.