概述

300mm wafers have become the industry standard for semiconductor development and manufacturing. Exceptional FOUP cleaning is required for advanced products especially with the introduction of EUV lithography. Hugle Electronics has built on the solid performance of the UPC-12100 by introducing the UPC-12500. The 12500 is a fully automatic FOUP Cleaning System with excellent performance, throughput and reliability. Advancements for the new system include higher throughput, energy savings, and a smaller footprint. The UPC-12500 was designed and manufactured based on SEMI standard, UL and CE marking. It is also compatible with Automated Material Handling Systems (AMHS) like OHT or RGV and Communication protocol (GEM300), so it is suitable for On-line control.