QUALISURF QSF-200
概述
The QUALISURF QSF-200 control system is a fully automated chemical process control system designed to support Post Etch Residue Removal (PERR), W Contact, TiN Hard Mask Removal, and AlOx/HMO Cleans. Get better utilization of your existing equipment by connecting QUALI-SURF to multiple tools and chemistries.
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