BROOKS AUTOMATION

MTX 2000

Dual Stocker 1500

MTX2000/2

Brooks Automation Reliance ATR8 Wafer Transfer Robot

ATR-8

FIXLOAD 6M	

MTX 4000	

Series 8 Controller

5850E

PRE 200

The unified wafer management system gives the Spartan™ Sorter the minimum scale and complexity required to accomplish its core job: to move wafers as cleanly and as quickly as possible. The Spartan Sorter offers improved reliability and maximized efficiency while delivering industry-leading cleanliness with the lowest particle levels.

Ease of set-up and serviceability are key attributes of the Spartan Sorter. Its simple, scalable architecture is easy to service and maintain. Fully compliant with SEMI standards, the Spartan Sorter is available in several options to support various sorting applications.

Spartan Sorters

002-7200-21

FIXLOAD 6"

DBM 2406

107434

FIXLOAD 25

MULTITRAN 5

002-9401-01

PRE 300

MAGNATRAN 70

152465

MX400

FIXLOAD V6

002-3987-02

300mm Front Opening Unified Pod (FOUP) loadport

002-7200-20

The Brooks Automation Jet system is an Equipment Front End Module or EFEM. It is the link between the factory’s Material Transport System and the Process Tool.

108446

EEPC

APS 2000

002-7391-33

***PARTS***

211104-0001-ERUR

M1900	

GF125CXXC

ABM407B

S9 JET

FPD-408-2-S

121655

ERGOSPEED II

013096-057-20

0162770-02

127000-138

SENTRY 1510

MTX 4020 

APS 2XT

002-7391-15

ULTRASORT 408

METARA 7200

MPO-1000

SCS 3000

BACKBORN

SCS 2000

MX400 Magnatran 7

BROOKS AUTOMATION

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